Shihlien Fine Chemicals Co., Ltd.
We specialize in manufacturing electronic-grade gases for semiconductor wafer fabrication, supplying critical materials for advanced processes used by companies such as TSMC.
We are Taiwan's first and currently the only specialty gases manufacturer capable of end-to-end, fully integrated self-production of  electronic-grade silicon-based materials (including silane, high-grade silanes, and chlorosilanes) .
Our ultra-high purity products include:
• 6N Silane (SiH₄) — >99.9999%, industry benchmark in Asia
• 5N Disilane (Si₂H₆) — >99.999%
• 2N Monochlorosilane (SiH₃Cl) — >99%
• 4N Dichlorosilane (SiH₂Cl₂) — >99.99%

We are the only company in Taiwan with fully localized and vertically-integrated production of electronic-grade silane and silicon-based specialty gases.
Headquarters: Songshan District, Taipei
Manufacturing Site: Guanyin, Taoyuan Technology Industrial Park
Close to major highways and 40 minutes from Hsinchu Science Park, enabling rapid customer support.
Our Mission
With the vision of “Local Manufacturing, Global Connection,”
we have developed a complete in-house production chain:
STC/MGS → TCS → DCS → MCS → Silane (SiH₄) → Disilane (Si₂H₆)
This enables stable supply of high-purity silane-series gases for CVD and epitaxy applications in semiconductor, display, and optoelectronic industries, while reducing import dependence and strengthening Taiwan’s material resilience.

Shihlien Fine Chemicals (SFC) produces electronic specialty gases that are critical materials for semiconductors, flat panel display and PV  manufacturing. Founded in October 2009, SFC offers silane (SiH₄), as well as monochlorosilane (MCS), dichlorosilane (DCS), and disilane (DS). SFC can now mass produce silane at a full capacity, and is in the process of qualifying MCS,  DCS and DS. Most of major semiconductor and panel manufacturing companies in Taiwan are our clients. We are also exporting silane to China, Southeast Asia, and Europe markets.
 
The technology SFC employs are originally from a world-leading company, which specializes in design and construction of transfer systems for chemical industry. SFC has refined the original technology in production process and owns in-house critical manufacturing technique and patents.